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Sampling techniques for the analysis of microscopic foreign substances

Sampling techniques for the analysis of microscopic foreign substances

We will report rapid analysis results using various sampling techniques regarding foreign substances that significantly impact the yield of electronics products.

■Special Sampling Techniques for Foreign Substances in Multilayer Films - Foreign substances buried in metal films on substrates Metal film etching ⇒ Transfer to Si wafer ⇒ FT-IR analysis - Foreign substances in multilayer films Cutting off the surface layer ⇒ Transfer to Si wafer ⇒ FT-IR analysis Microtome/FIB thinning ⇒ Transfer to Si wafer ⇒ FT-IR analysis

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Liquid foreign substance sampling technique for FT-IR analysis

Liquid foreign substance sampling technique for FT-IR analysis

Sampling using capillaries through surface tension! FT-IR analysis has become possible.

Traditionally, sampling of liquid foreign substances has been considered very difficult. In the liquid foreign substance sampling technique for FT-IR analysis, sampling is performed using a capillary and surface tension, making FT-IR analysis possible. 【Sampling Procedure】 ■ Liquid foreign substances on the substrate ■ Sampling with a capillary ■ Transferring the liquid onto a Si wafer for FT-IR analysis ■ Sampling in progress with the capillary ■ Transferring to the Si wafer *For more details, please refer to the PDF document or feel free to contact us.

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